論文
公開件数:127件
No. 掲載種別 単著・共著区分 タイトル 著者 誌名 出版者 巻号頁 出版日 ISSN DOI URL 概要
1 研究論文(学術雑誌)
共著
Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function
Y. Hasegawa, H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida
Journal of Micromechanics and Microengineering

27/ 12
2017

10.1088/1361-6439/aa9595


2 研究論文(学術雑誌)
共著
Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway
N. Harada, Y. Hasegawa, R. Ono, M. Matsushima, T. Kawabe, M. Shikida
Microsystem Technologies

23/ 12, 5397-5406
2017

10.1007/s00542-016-3265-9


3 研究論文(学術雑誌)
共著
Smooth-surfaced flexible wall shear stress sensor fabricating by film transfer technology
Y. Hasegawa, C. Okihara, T. Yamada, K. Komatsubara, K. Iwano, Y. Sakai, M. Shikida
Sensors and Actuators A

265, 86-93
2017

10.1016/j.sna.2017.08.016


4 研究論文(学術雑誌)
共著
Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor
M. Shikida, P. Kim, S. Shibata
Microsystem Technologies

23/ 8, 3547-3558
2017

10.1007/s00542-016-3168-9


5 研究論文(学術雑誌)
共著
Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions
H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
IEEE Sensors Journal
IEEE
17/ 14, 4369-4377
2017

10.1109/JSEN.2017.2707594


6 研究論文(学術雑誌)
共著
Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application
M. Shikida, Y. Niimi, S. Shibata
Microsystem Technologies

23/ 3, 677-685
2017




7 研究論文(学術雑誌)
共著
Development of implantable catheter flow sensor into inside of bronchi for laboratory animal
M. Shikida, T. Matsuyama, T. Yamada, M. Matsushima, T. Kawabe
Microsystem Technologies

23/ 1, 175-185
2017

10.1007/s00542-015-2663-8


8 研究論文(学術雑誌)
共著
Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching
K. Imaeda, K. Bessho, M. Shikida
Microsystem Technologies

22/ 12, 2801-2809
2016

10.1007/s00542-015-2590-8


9 研究論文(学術雑誌)
共著
Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy
K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang
Microsystem Technologies

22/ 6, 1181-1188
2016




10 研究論文(学術雑誌)
共著
Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator
T. Ando, M. Shikida, K. Sato
Sensors and Materials

28/ 2, 113-120
2016




11 研究論文(学術雑誌)
共著
Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM
M. Shikida, Y. Niimi, T. Hasegawa, T. Sugino, S. Hamaoka, K. Fukuzawa
Microsystem Technologies

21, 661-668
2015




12 研究論文(学術雑誌)
共著
Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer
J. IL Lee, M. Shikida, K. Sato
Microsystem Technologies

21, 239-246
2015




13 研究論文(学術雑誌)
共著
Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability
M. Shikida, S. Kitamura, C. Miyake, K. Bessho
Microsystem Technologies

20, 2239-2245
2014




14 研究論文(学術雑誌)
共著
On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor
T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, S. Muramatsu
Journal of Fluid Science and Technology

9/ 3, 1-13
2014




15 研究論文(学術雑誌)
共著
Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet
T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito
Journal of Japanese Society for Experimental Mechanics

14, s13-s18
2014




16 研究論文(学術雑誌)
共著
Lateral-Deflection-Controlled Friction Force Microscopy
K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang
Journal of Applied Physics

116, 084311-
2014




17 研究論文(学術雑誌)
共著
Structural design of polymer-based tactile sensor with table-shaped sensing pad
J. IL Lee, H. Shin, M. Shikida, K. Sato
Microelectronic Engineering

127/ 5, 1-6
2014




18 研究論文(学術雑誌)
共著
Catheter flow sensor with temperature compensation for tracheal intubation tube system
M. Shikida, K. Yoshikawa, T. Matsuyama, Y. Yamazaki, M. Matsushima, T. Kawabe
Sensors and Actuators A

155-160
2014




19 研究論文(学術雑誌)
共著
呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発
松山拓矢, 山﨑雄大, 松島充代子, 川部勤, 式田光宏
電気学会論文誌E(センサ・マイクロマシン部門誌)

134/ 6, 126-131
2014




20 研究論文(学術雑誌)
共著
Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method
M. Mizoshiri, M. Mikami, K. Ozaki, M. Shikida, S. Hata
Applied Physics Express

7, 057101-
2014




21 研究論文(学術雑誌)
共著
Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments
M. Shikida, T. Shikano, T. Matsuyama, Y. Yamazaki, M. Matsushima, T. Kawabe
Microsystem Technologies

20, 505-513
2014




22 研究論文(学術雑誌)
共著
Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets
M. Shikida, T. Sugito, M. Okochi, H. Honda
Microsystem Technologies

20, 315-323
2014




23 研究論文(学術雑誌)
共著
Measurement of Wall Shear Stress by Using Micro-fabricated Hot-film and Floating-element Sensors
O. Terashima, T. Sawada, Y. Sakai, K. Nagata, H. Hida, M. Shikida
Journal of the Japanese Society for Experimental Mechanicas

13, s1-s6
2013




24 研究論文(学術雑誌)
共著
A Table-shaped tactile sensor for detecting triaxial force on the basis of strain distribution
J. IL Lee, M-G Kim, M. Shikida, K. Sato
Sensors

13, 16347-16359
2013




25 研究論文(学術雑誌)
共著
Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems
P.A. Tuan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato
H. Kuwano
Appied Physics Letters

103, -181901
2013




26 研究論文(学術雑誌)
共著
Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy
K. Fukuzawa, H. Tsuji, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang
Microsystem Technologies

19, 1567-1572
2013




27 研究論文(学術雑誌)
共著
A flexible transparent touch panel based on ionic liquid channel
M. Shikida, K. Asano
IEEE Sensors

13, 3490-3495
2013




28 研究論文(学術雑誌)
共著
Mechanical strengthening of Si cantilevers by chemical wet etching
M. Shikida, T. Hasegawa, K. Hamaguchi, K. Sato
Microsystem Technologies

19, 547-553
2013




29 研究論文(学術雑誌)
共著
A MEMS flow sensor applied in a variable-air-volume air-conditioning system unit in a building
M. Shikida, Y. Yamazaki, K. Yoshikawa, K. Sato
Sensors and Actuators A

189, 212-217
2013




30 研究論文(学術雑誌)
共著
Measured viscous and dry friction forces in nanometer-thick lubricant film by friction force Microscopy with Micromechanical Probe

TRIBOLOGY LETTERS

48, 201-208
2012




31 研究論文(学術雑誌)
共著
Flexible flow sensor for large scale air-conditioning network systems

Sensors and Actuators A

188, 2-8
2012




32 研究論文(学術雑誌)
共著
Laser Ablation Propulsion Performance of Surface-Modified Polyacetal

Journal of Propulsion and Power

28, 840-847
2012




33 研究論文(学術雑誌)
共著
An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope

Sensors and Actuators A

175, 94-100
2012




34 研究論文(学術雑誌)
共著
Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulation

Journal of Micromechnics and Microengineering

21, -067006 (7pp)
2011




35 研究論文(学術雑誌)
共著
Droplet introduction into pen-shaped portable reaction system by gravity and interfacial forces

Micro & Nano Letters

6, 253-256
2011




36 研究論文(学術雑誌)
共著
Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution

Journal of Micromechnics and Microengineering

21, -015008 (11pp)
2011




37 研究論文(学術雑誌)
共著
Large-sized fabric tactile sensor for detecting contacted object

Micro & Nano Letters

5, 389-392
2010




38 研究論文(学術雑誌)
共著
Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways

Journal of Micromechnics and Microengineering

20, -125030 (11pp)
2010




39 研究論文(学術雑誌)
共著
Fabrication of monolithically integrated flow sensor on tube

Sensors and Actuators A

163, 61-67
2010




40 研究論文(学術雑誌)
共著
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy

Tribology Online

5, 144-149
2010




41 研究論文(学術雑誌)
共著
Fabric tactile sensor composed of ball-shaped umbonal fiber for detcting normal and lateral force

Micro & Nano Letters

5, 211-214
2010




42 研究論文(学術雑誌)
共著
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

Journal of Micromechnics and Microengineering

20, -065008 (9pp)
2010




43 研究論文(学術雑誌)
共著
Fabrication of a Stent-type Thermal Flow Sensor for Measuring Nasal Respiration

Journal of Micromechnics and Microengineering

20, -055029 (8pp)
2010




44 研究論文(学術雑誌)
共著
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement

Biomedical Microdevices

12, 247-252
2010




45 研究論文(学術雑誌)
共著
Droplet-based gene expression analysis using a device with magnetic force-based-droplet-handling system

J. Bioscience and Bioengineering

109, 193-197
2010




46 研究論文(学術雑誌)
共著
The mechanism of selective corrugation removal by KOH anisotropic wet etching

Journal of Micromechnics and Microengineering

20, -015038 (9pp)
2010




47 研究論文(学術雑誌)
共著
Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Sensors and Actuators A

156, 334-341
2009




48 研究論文(学術雑誌)
共著
A Catheter-type Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchial Region

Journal of Micromechnics and Microengineering

19, -105027 (9pp)
2009




49 研究論文(学術雑誌)
共著
Development of self vibration/detection AFM probe using quartz tuning fork

IEEJ Transactions on Electrical and Electronic Engineering

4, 378-385
2009




50 研究論文(学術雑誌)
共著
Magnetic force-based Lab-on-a-chip for single cell analysis in a droplet

ECS Transactions

16, 15-20
2009




51 研究論文(学術雑誌)
共著
Agitation of Magnetic Beads by Multi-layered Flat Coils

Sensors and Actuators: B

137, 774-780
2009




52 研究論文(学術雑誌)
共著
Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Sensors and Actuators: A

154, 192-203
2009




53 研究論文(学術雑誌)
共著
Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope

Tribology Online

3, 356-360
2008




54 研究論文(学術雑誌)
共著
Fabrication of Quartz Tuning-Fork probe with Sharp Tip for AFM Systems

Sensors and Actuators: A

148, 311-318
2008




55 研究論文(学術雑誌)
共著
Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching

ECS Transactions

16, 133-140
2008




56 研究論文(学術雑誌)
共著
Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber

Journal of Micromechnics and Microengineering

18, -085014 (8pp)
2008




57 研究論文(学術雑誌)
共著
Fabrication of a bubble driven arrayed actuator for a tactile display

Journal of Micromechnics and Microengineering

18, -065012 (9pp)
2008




58 研究論文(学術雑誌)
共著
A Palmtop-sized Rotary-drive-type Biochemical Analysis System by Magnetic Beads Handling

Journal of Micromechnics and Microengineering

18, - 035034 (8pp)
2008




59 研究論文(学術雑誌)
共著
Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis

Lab on a Chip

8, 134-142
2008




60 研究論文(学術雑誌)
共著
On-chip Polymerase Chain Reaction Microdevice Employing a Magnetic Droplet-Manipulation System

Sensors & Actuators: B

130, 583-588
2008




61 研究論文(学術雑誌)
共著
Effect of temperature on fracture toughness in single-crystal-silicon film and transition in its fracture mode

Journal of Micromechnics and Microengineering

18, -015026 (7pp)
2008




62 研究論文(学術雑誌)
共著
Micromechanical characterization of electroplated permalloy films for MEMS

Microsystems Technologies

14, 131-134
2008




63 研究論文(学術雑誌)
共著
Influence of sub-micrometer notches on the fracture of single crystal silicon thin films

Fatigue & Fracture of Engineering Materials & Structures

30, 1172-1181
2007




64 研究論文(学術雑誌)
共著
Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants

Journal of Micromechnics and Microengineering

17, 2299-2307
2007




65 研究論文(学術雑誌)
共著
Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition

Sensors & Actuators: A

138, 87-96
2007




66 研究論文(学術雑誌)
共著
Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application

IEEJ Transactions on Electrical and Electronic Engineering

2, 340-347
2007




67 研究論文(学術雑誌)
共著
Experimental and theoretical study of an on-wall in-tube flexible thermal sensor

Journal of Micromechnics and Microengineering

17, 679-686
2007




68 研究論文(学術雑誌)
共著
Effect of magnesium in KOH solution on the anisotropic wet etching of silicon

Sensors & Actuators: A

134, 465-470
2007




69 研究論文(学術雑誌)
共著
Mechanical design and force calibration of dual-axis micro-mechanical probe for friction force microscopy

Journal of Applied Physics

101, 034308-1-6-
2007




70 研究論文(学術雑誌)
共著
Proposal of pumpless, valveless, and flowless miniaturized reactor using magnetic beads for the portable analysis device

Journal of Chemical Engineering of Japan

39, 1296-1299
2006




71 研究論文(学術雑誌)
共著
A Force Transmission System based on a Tulip-shaped Electrostatic Clutch for Haptic Display Devices

Journal of Micromechnics and Microengineering

16, 2673-2683
2006




72 研究論文(学術雑誌)
共著
Dual-axis micro-mechanical probe for independent detection of lateral and vertical forces

Applied Physics Letters

89, 173120-
2006




73 研究論文(学術雑誌)
共著
摩擦力・加重の独立測定可能な摩擦力顕微鏡用マイクロプローブ

機械学会論文誌C編

72, 3655-3664
2006




74 研究論文(学術雑誌)
共著
Fabrication of a Hollow Needle Structure by Dicing, Wet Etching, and Metal Deposition

Journal of Micromechnics and Microengineering

16, 2230-2239
2006




75 研究論文(学術雑誌)
共著
Development of an enzymatic reaction device using magnetic beads-cluster handling

Journal of Micromechnics and Microengineering

16, 1875-1883
2006




76 研究論文(学術雑誌)
共著
Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching

Journal of Micromechnics and Microengineering

16, 1740-1747
2006




77 研究論文(学術雑誌)
共著
An active tactile sensor for detecting mechanical characteristics of contacted objects

Journal of Micromechnics and Microengineering

16, 1625-1632
2006




78 研究論文(学術雑誌)
共著
Mechanical properties of a micron-sized SCS film in a high-temperature environment

Journal of Micromechnics and Microengineering

16, 715-720
2006




79 研究論文(学術雑誌)
共著
Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution

Sensors & Actuators: A

128, 125-131
2006




80 研究論文(学術雑誌)
共著
Improvement in smoothness of anisotropically etched silicon surface: Effects of surfactant and TMAH concentration

Sensors & Actuators: A

125, 415-421
2006




81 研究論文(学術雑誌)
共著
Using Wettability and Interfacial Tension to Handle Droplets of Magnetic Beads in a Micro-Chemical-Analysis System

Sensors & Actuators: B

113, 563-569
2006




82 研究論文(学術雑誌)
共著
Fracture toughness measurement of thin-film silicon

Fatigue & Fracture of Engineering Materials & Structures

28, 687-694
2005




83 研究論文(学術雑誌)
共著
Characterization of orientation-dependent etching properties of quartz: Application to 3-D micromachining simulation system

Sensors & Materials

17, 179-186
2005




84 研究論文(学術雑誌)
共著
Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon

The Transactions of The Institute of Electrical Engineers of Japan

125, 307-312
2005




85 研究論文(学術雑誌)
共著
Measurement for fracture toughness of single crystal silicon film with tensile test

Sensors & Actuators: A

119, 229-235
2005




86 研究論文(学術雑誌)
共著
Polyimide film micromachining by wet-etching technology

The Transactions of The Institute of Electrical Engineers of Japan

125, 27-36
2005




87 研究論文(学術雑誌)
共著
Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications

Journal of Micromechnics and Microengineering

15, 282-289
2005




88 研究論文(学術雑誌)
共著
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition

Sensors & Actuators: A

117, 143-150
2005




89 研究論文(学術雑誌)
共著
Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic Etching

Sensors & Actuators: A

116, 264-271
2004




90 研究論文(学術雑誌)
共著
Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures

Journal of Micromechnics and Microengineering

14, 1462-1467
2004




91 研究論文(学術雑誌)
共著
Through-wafer interconnection technology for silicon

Journal of Micromechnics and Microengineering

14, 1029-1036
2004




92 研究論文(学術雑誌)
共著
A micromachined active tactile sensor for hardness detection

Sensors & Actuators: A

114, 141-146
2004




93 研究論文(学術雑誌)
共著
Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

Sensors & Actuators: A

114, 516-520
2004




94 研究論文(学術雑誌)
共著
Three-dimensional interconnect technology on a flexible polyimide film

Journal of Micromechnics and Microengineering

14, 38-48
2004




95 研究論文(学術雑誌)
共著
Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching

Sensors & Materials

15, 93-99
2003




96 研究論文(学術雑誌)
共著
Effect of ppb-level metal impurities in KOH solution on the etching of Si {110} and {100}

Sensors & Materials

15, 43-51
2003




97 研究論文(学術雑誌)
共著
Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon

Sensors & Materials

15, 21-35
2003




98 研究論文(学術雑誌)
共著
Active tactile sensor for detecting contact force and hardness of an object

Sensors & Actuators: A

103, 213-218
2002




99 研究論文(学術雑誌)
共著
Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors

Sensors & Actuators: A

100, 114-122
2002




100 研究論文(学術雑誌)
共著
Tensile testing system for sub-micrometer thick films

Sensors & Actuators: A

97-98, 492-496
2002




101 研究論文(学術雑誌)
共著
A model explaining mask-corner undercut phenomena in anisotropic silicon etching: A saddle point in the etching-rate diagram

Sensors & Actuators: A

97-98, 758-763
2002




102 研究論文(学術雑誌)
共著
Microfabricated silicon dioxide cantilever with subwavelength aperture

Journal of Microscopy

202, 12-15
2001




103 研究論文(学術雑誌)
共著
Change in orientation-dependent etching properties of single-crystal silicon caused by a surfactant added to TMAH solution

Sensors and Materials

13, 285-291
2001




104 研究論文(学術雑誌)
共著
Micro-morphology of single crystalline silicon surface during anisotropic wet in KOH and TMAH

Sensors & Actuators: A

93, 232-242
2001




105 研究論文(学術雑誌)
共著
Micro-morphology of single crystalline silicon surface during anisotropic wet chemical etching in KOH: velocity source forests

Sensors & Actuators: A

93, 219-231
2001




106 研究論文(学術雑誌)
共著
Tensile-mode fatigue testing of silicon film as structural materials for MEMS

Sensors & Actuators: A

93, 70-75
2001




107 研究論文(学術雑誌)
共著
Patterning of polyamide and metal in deep trench

Sensors & Actuators: A

92, 208-213
2001




108 研究論文(学術雑誌)
共著
Surface roughness of single-crystal silicon etched by TMAH solution

Sensors & Actuators: A

90, 223-231
2001




109 研究論文(学術雑誌)
共著
薄膜材料を対象とするオンチップ引張疲労試験システムの開発

精密工学会誌

66, 1890-1894
2000




110 研究論文(学術雑誌)
共著
Surface morphology of anisotropically etched single-crystal silicon

Journal of Micromechnics and Microengineering

10, 522-527
2000




111 研究論文(学術雑誌)
共著
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip

Sensors & Actuators: A

82, 291-296
2000




112 研究論文(学術雑誌)
共著
Development of an orientation-dependent anisotropic etching simulation system MICROCAD

Electronics and Communications in Japan

83, 13-22
2000




113 研究論文(学術雑誌)
共著
Differences in anisotropic etching properties of KOH and TMAH

Sensors & Actuators: A

80, 179-188
2000




114 研究論文(学術雑誌)
共著
薄膜材料のオンチップ引張試験法の提案と試験デバイスの製作

日本機械学会論文集(C編)

65, 2973-2978
1999




115 研究論文(学術雑誌)
共著
結晶異方性エッチング解析システムMICROCADの開発

電子情報通信学会論文誌C-II

J82-C-II, 84-91
1999




116 研究論文(学術雑誌)
共著
Roughening of single-crystal silicon surface etched by KOH water solution

Sensors & Actuators: A

73, 122-130
1999




117 研究論文(学術雑誌)
共著
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Sensors & Actuators: A

73, 131-137
1999




118 研究論文(学術雑誌)
共著
オンチップ引張試験によるシリコン薄膜の応力とひずみの測定

電気学会論文誌E

119, 67-72
1999




119 研究論文(学術雑誌)
共著
Tensile-testing of silicon film having different crystallographic orientations carried out on a silicon chip

Sensors & Actuators: A

70, 148-152
1998




120 研究論文(学術雑誌)
共著
Characterization of orientation dependent etching properties of single-crystal silicon: Effect of KOH concentration

Sensors & Actuators: A

64, 87-93
1998




121 研究論文(学術雑誌)
共著
Operation of an S-shaped film actuator in liquid environmentconcentration

The Transactions of The Institute of Electrical Engineers of Japan

117-E, 227-231
1997




122 研究論文(学術雑誌)

Fabrication of an S-shaped microactuator

IEEE/ASME Journal of Microelectro-mechanical Systems

6, 18-24
1997




123 研究論文(学術雑誌)
共著
S字型静電駆動フィルムアクチュエータの動作特性
-雰囲気圧力がフィルム移動速度に及ぼす影響-

電気学会論文誌E

116, 395-401
1996




124 研究論文(学術雑誌)
共著
An electrostatic gas valve that works in higher than atmospheric gas pressure

The Transactions of The Institute of Electrical Engineers of Japan

116-E, 219-224
1996




125 研究論文(学術雑誌)
共著
An electrostatically actuated gas valve with an S-shaped film element

Journal of Micromechnics and Microengineering

4, 205-209
1994




126 研究論文(学術雑誌)
共著
Electrostatically driven gas valve with high conductance

IEEE/ASME Journal of Microelectro-mechanical Systems

3, 76-80
1994




127 研究論文(学術雑誌)
共著
Orientation and transformation of flagella in electrostatic field

IEEE Transactions on Industry Applications

28, 1194-1202
1992